Get Hydrogen Silsesquioxane essential facts below. View Videos or join the Hydrogen Silsesquioxane discussion. Add Hydrogen Silsesquioxane to your PopFlock.com topic list for future reference or share this resource on social media.
Hydrogen silsesquioxane (R = H).
Hydrogen silsesquioxane (HSQ) is class of inorganic compounds with the chemical formula [HSiO3/2]n. Such clusters are specific representatives of the family of silsesquioxanes with the formula [RSiO3/2]n (R = alkyl, halide, alkoxide, etc.). The most widely studied member of the hydrogen silsesquioxanes is the cubic cluster H8Si8O12.
Cross-linking of the HSQ can is achieved through exposure to e-beam or EUV radiation with wavelengths shorter than 157 nm.
A collection of practical knowledge for using HSQ is provided by Georgia Tech.
^David B. Cordes; Paul D. Lickiss; Franck Rataboul (2010). "Recent Developments in the Chemistry of Cubic Polyhedral Oligosilsesquioxanes". Chem. Rev. 110 (4): 2081-2173. doi:10.1021/cr900201r. PMID20225901.
^Grigorescu, A. E.; van der Krogt, M. C.; Hagen, C. W.; Kruit, P. (2007). "10 nm lines and spaces written in HSQ, using electron beam lithography". Microelectronic Engineering. 84 (5-8): 822-824. doi:10.1016/j.mee.2007.01.022.